Technical configuration (All our machine can be customized by your products and needs):

1. Chamber structure: vertical/horizontal front door structure or continuous coating line. Chamber adopts SUS304 material.size can be customer-made by your products.

2. Sputtering power supply :equipped with DC and medium frenquency power 60KW-100KW

3. Sputtering target: equipped with Aluminum or Titanium targets .

4. Transmission system:frequency control

5. Vacuum system: Diffusion pump (molecular pump is optional)+Roots pump +Mechanical pump + Rotary vane pump(cryogenic pump is optional)

6. Gas control: multi way sevenstar mass flow controller

7. Heating system:Controllable and adjustable from room temperature to 350 (PID temperature control).

9. Control mode: manual operation +semiautomatic + automatic integration / touch screen HMI + PLC

10 .Other technical parameters:

Pump time: 5*10-2pa<4mins

Ultimate vacuum:5*10-4pa

Water pressure≥0.2Mpa 3m3/h, water temperature≤25, gas pressure:0.4-0.8Mpa